Surface Science

Created by Dean Powers Last modified at May 7, 2009 9:14 PM

Technique	Description	Typical Applications	Signal Detected	Resolution	Imaging	DMS Navigation Capability	Minimum Spot Size
SIMS Secondary Ion Mass Spectroscopy	Mass analysis surface and depth profiling	Dopant or compositional element depth analysis	Secondary Ions	1e12 at/cm	Yes	No	1 μm
Quad-SIMS Quadrupole Secondary Ion Mass Spectroscopy	Thin Film and Shallow Implant Depth Profile	Compositional element depth profile	Secondary Ions	1E16 at/cm	No	No	50µm x 50µm raster
TOF-SIMS Time Of Flight SIMS	Surface mass analysis	Surface contamination	Secondary Ions	1e8 at/cm2	Yes	Yes	1 µm
AES Auger Electron Spectroscopy	Elemental surface analysis	Depth profiling with Ar sputter, surface contamination, cross-section analysis	Auger electrons	0.1-1 at%	Yes	Yes	300 Å
ESCA Electron Spectroscopy for Chemical Analysis (aka XPS)	Elemental Surface analysis	Depth profiling with Ar sputter, chemical state information, thin film composition analysis	Photoelectrons	0.1 at%	No	No	10 μm
XRD X-Ray Diffraction	Crystal Orientation Analysis	Grain size, orientation, and texture analysis	Crytal plane d-spacing	+/-.5%	No	No	10 mm X 1mm STD special 1mm spot
XRR X-Ray Reflection	Reflectivity Analysis	Density, Interface, Roughness, and Thickness of thin films	Reflected X-rays	+/- 3% of signals detected	No	No	10mm x 50mm
AFM Atomic Force Microscopy	Surface topography	Roughness of thin films, and step height information	Atomic morphology	< 2 Å	Yes	Yes (Manual	50 Å
RAMAN Micro-Raman Spectroscopy	Molecular composition	Defect analysis, thin film monitoring	Bond vibration frequencies	Sample dependent	Yes	Yes	100 nm

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Surface Science