Analytical Chemistry

Technique

Description

Typical Application

Sample Types

Working Range

HR-ICPMS

High Resolution Inductively Coupled Plasma Mass Spectrometer

Identify and measure trace metals in aqueous samples

VPD samples, ultra pure water, process chemicals, material extracts, chemical waste streams

ppt to ppb

VPD

Vapor Phase Decomposition

Collection process used to identify and measure trace metals on wafer surfaces.

Silicon wafers, thin films

E7 to E14 atoms/cm2

ICPOES

Inductively Coupled Plasma Optical Emission Spectrometer

identify and measure trace metals in aqueous samples

water, chemicals, material extracts, slurries, chemical waste streams

ppb to ppm

WDXRF

Wavelength Dispersive X-Ray Fluorescence Spectrometer

qualitative and quantitative elemental analysis of solid materials

Identify unknowns, elemental bulk analysis, thin films composition, contaminant studies

ppm to wt%

FTIR

Micro Fourier Transform Infrared Spectrometer

identification of organic and inorganic compounds

Identify molecular composition of organic materials and polymers, characterize thin films, analyze non-reactive gases

wt%

ATD-GC-MS

Thermal Desorb Gas Chromatograph Mass Spectrometer

qualitative and quantitative analysis of organic compounds and mixtures

solvents, air samples, process chemicals, water, polymers, wafers

ppb to wt%

TOC

Total Organic Carbon Analyzer

inorganic and organic carbon determinations in aqueous samples

water, water extracts

0.1 to 10ppm

Auto-Titrator

Potentiometry based autotitration systems

acid/base/chemical assays water content in organic solvents

process chemicals, cleaning baths, chemicals waste streams

0.1 to 10ppm