ToF-SIMS (Time of Flight Secondary Ion Mass Spectroscopy) is one of the
major techniques for surface characterazation of solid material. The
instrument uses a time of flight analyzer to collect secondary ions
from the surface. The primary ion beams are typically gallium or
cesium. Two biggest advantages of ToF-SIMS are the high mass resolution
and the lack of need for a priori knowledge of the surface. Mass
spectra can be collected in both positive mode and negative mode,
yielding rich information about the surface characteristics.