ATD-GC-MS is a hyphenated technique which separates mixtures of organic
compounds and determines the identity and concentration of each
component. The mixture is typically introduced onto adsorbent media
contained inside a glass or metal tube. The tube is heated to vaporize
the mixture and the vapor is injected onto a capillary gas
chromatographic column. The column separates the mixture into
individual components which then enter a quadrupole mass spectrometer.
The mass spectrum of each component is recorded and compared to a database of known compounds for positive identification. The mass spectrum intensity may be used for quantitation. This technique is capable of detecting picogram quantities of material. ATD-GC-MS is a powerful tool for identifying organic contaminants. These may be present as an adsorbed film on silicon wafers, as airborne vapors in the manufacturing environment, as dissolved components in ultrapure water or process chemicals, or as vapors which outgas from plastics, coatings, garments, o-rings and similar materials.
The mass spectrum of each component is recorded and compared to a database of known compounds for positive identification. The mass spectrum intensity may be used for quantitation. This technique is capable of detecting picogram quantities of material. ATD-GC-MS is a powerful tool for identifying organic contaminants. These may be present as an adsorbed film on silicon wafers, as airborne vapors in the manufacturing environment, as dissolved components in ultrapure water or process chemicals, or as vapors which outgas from plastics, coatings, garments, o-rings and similar materials.