Auger Electron Spectroscopy (AES)

Auger (Pronounced as ~o-jay) Electron Spectroscopy (AES) is an electron beam technique used to characterize elemental composition of surfaces. The near surface of ~20-50 Å is characterized for its chemical composition. All elements except H and He can be detected at concentrations as low as 0.1% to 1% depending on the elements. In conjunction with an Ar+ ion beam, elemental composition can be characterized as a function of depth at a very high resolution. This capability is useful in characterizing interfaces at specific locations. The high-resolution field emission system with full wafer capability and an optimum beam diameter of ~350 Å, can be used to navigate to well defined defects identified by FAB based tools. In addition, Auger line scans across interfaces and elemental mapping of surfaces can be performed.